olemus
miniatuurne (0,001-0,1 mm) süsteem
elektrooniliste ja mehaaniliste elementide
kombinatsioonina

Wiktionary:
an electromechanical system composed of micron-sized components (of the range 1μm–100μm) in a millimetre-sized system (of the range 0.02mm–1mm)

ülevaateid
https://en.wikipedia.org/wiki/Microelectromechanical_systems

https://en.wikipedia.org/wiki/Radio-frequency_microelectromechanical_system

https://en.wikipedia.org/wiki/Microoptoelectromechanical_systems

https://www.osti.gov/servlets/purl/1116846

https://www.lboro.ac.uk/microsites/mechman/research/ipm-ktn/pdf/Technology_review/an-introduction-to-mems.pdf

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC7019281/

https://memscyclopedia.org/Document/IntroMEMS.pdf

vt ka
- HI-MEMS
- nutitolm